Invention Grant
- Patent Title: Trench FET having merged gate dielectric
- Patent Title (中): 具有合并栅电介质的沟槽FET
-
Application No.: US14095198Application Date: 2013-12-03
-
Publication No.: US09391191B2Publication Date: 2016-07-12
- Inventor: Ling Ma
- Applicant: International Rectifier Corporation
- Applicant Address: US CA El Segundo
- Assignee: Infineon Technologies Americas Corp.
- Current Assignee: Infineon Technologies Americas Corp.
- Current Assignee Address: US CA El Segundo
- Agency: Farjami & Farjami LLP
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/40 ; H01L29/66 ; H01L29/423

Abstract:
In one implementation, a trench field-effect transistor (trench FET) includes a semiconductor substrate having a drain region, a drift zone over the drain region, and depletion trenches formed over the drain region. Each depletion trench includes a depletion trench dielectric and a depletion electrode. The trench FET can further include a respective bordering gate trench situated alongside each depletion trench, each bordering gate trench having a gate electrode and a gate dielectric. The gate dielectric is merged with the depletion trench dielectric between the depletion electrode and the gate electrode.
Public/Granted literature
- US20140167153A1 Trench Fet Having Merged Gate Dielectric Public/Granted day:2014-06-19
Information query
IPC分类: