Invention Grant
- Patent Title: Substrate for optics having a plurality of dot lines, semiconductor light emitting device. and exposure apparatus
- Patent Title (中): 具有多个点线的光学用基板,半导体发光装置。 和曝光装置
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Application No.: US14241837Application Date: 2012-08-30
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Publication No.: US09391236B2Publication Date: 2016-07-12
- Inventor: Fujito Yamaguchi , Jun Koike , Masatoshi Maeda
- Applicant: Fujito Yamaguchi , Jun Koike , Masatoshi Maeda
- Applicant Address: JP Tokyo
- Assignee: ASAHI KASEI E-MATERIALS CORPORATION
- Current Assignee: ASAHI KASEI E-MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2011-188803 20110831; JP2011-188804 20110831; JP2011-229121 20111018; JP2012-027548 20120210; JP2012-027549 20120210; JP2012-027550 20120210; JP2012-089230 20120410
- International Application: PCT/JP2012/071998 WO 20120830
- International Announcement: WO2013/031887 WO 20130307
- Main IPC: H01L33/22
- IPC: H01L33/22 ; H01L51/52 ; G03F7/00 ; G03F7/24 ; B29C43/46 ; G03F7/20 ; B82Y10/00 ; B82Y40/00 ; H01L33/00 ; H01L21/02

Abstract:
To provide a substrate for optics provided with a fine-structure product which improves luminous efficiency of an LED while improving internal quantum efficiency IQE by decreasing the number of dislocation defects in a semiconductor layer, a substrate for optics (1) is provided with a fine-structure layer (12) including dots comprised of a plurality of convex portions (13) extending in the direction of from the main surface of a substrate (11) to outside the surface, where the fine-structure layer (12) has a plurality of dot lines (13-1 to 13-N) in which a plurality of dots is arranged with a pitch Py in the first direction in the main surface of the substrate (11), while having the plurality of dot lines in which a plurality of dots is arranged with a pitch Px in the second direction orthogonal to the first direction in the main surface of the substrate (11), one of the pitch Py and the pitch Px is a constant interval of nano-order, while the other one is an inconstant interval of nano-order, or both are inconstant intervals of nano-order.
Public/Granted literature
- US20140217449A1 SUBSTRATE FOR OPTICS AND SEMICONDUCTOR LIGHT EMITTING DEVICE Public/Granted day:2014-08-07
Information query
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