Invention Grant
- Patent Title: Actuator and method for driving the same
- Patent Title (中): 执行机构及其驱动方法
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Application No.: US13962448Application Date: 2013-08-08
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Publication No.: US09391260B2Publication Date: 2016-07-12
- Inventor: Michihito Ueda , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant: PANASONIC CORPORATION
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2012-004997 20120113
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/187 ; H01L41/316 ; G02B26/08

Abstract:
Provided is a novel actuator and a method for driving the same. The present invention is an actuator comprising a first laminate comprising a first (Bi, Na, Ba) TiO3 layer between first and second electrode layers, a second laminate comprising a second (Bi, Na, Ba) TiO3 layer between third and fourth electrode layers, and a tilt part provided between the first and second laminates. Both of the first and second (Bi, Na, Ba) TiO3 layers are preferentially oriented in a [011] crystalline axis direction. Voltages V5a, V9a, V5b, and V9b which satisfy Requirement A: V5a>V9a and V5b V9b are applied to the first-fourth electrode layers so as to tilt the tilt part. One of the first edge and the second edge is moved in the [011] crystalline axis direction and the other is moved in the reverse direction thereof.
Public/Granted literature
- US20130320806A1 ACTUATOR AND METHOD FOR DRIVING THE SAME Public/Granted day:2013-12-05
Information query
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