Invention Grant
- Patent Title: FET sensing cell and method of improving sensitivity of the same
- Patent Title (中): FET感应电池及其提高灵敏度的方法
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Application No.: US14069823Application Date: 2013-11-01
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Publication No.: US09395326B2Publication Date: 2016-07-19
- Inventor: Tung-Tsun Chen , Jui-Cheng Huang , Chin-Hua Wen , Chun-wen Cheng , Yi-Shao Liu
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: G01N27/414
- IPC: G01N27/414 ; G01N33/543

Abstract:
The present disclosure provides a device, such as a FET sensing cell, which includes a first dielectric layer over a substrate, an active layer over the first dielectric layer, a source region in the active layer, a drain region in the active layer, a channel region in the active layer situated between the source region and the drain region, a sensing film over the channel region, a second dielectric layer over the active layer, wherein an opening is formed in the second dielectric layer and the sensing film is located within the opening, a first electrode located within the second dielectric layer and a fluidic gate region located over the second dielectric layer and extending into the opening. The present disclosure also provides a method for improving the sensitivity of a device by adjusting a sensing value.
Public/Granted literature
- US20150125872A1 FET SENSING CELL AND METHOD OF IMPROVING SENSITIVITY OF THE SAME Public/Granted day:2015-05-07
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