Invention Grant
- Patent Title: Junctionless nano-electro-mechanical resonant transistor
- Patent Title (中): 无结合纳米机电谐振晶体管
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Application No.: US14395626Application Date: 2013-04-19
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Publication No.: US09397285B2Publication Date: 2016-07-19
- Inventor: Sebastian Thimotee Bartsch , Mihai Adrian Ionescu
- Applicant: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Applicant Address: CH Lausanne
- Assignee: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Current Assignee: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Current Assignee Address: CH Lausanne
- Agency: Nixon & Vanderhye P.C.
- Priority: EP12164756 20120419
- International Application: PCT/IB2013/053113 WO 20130419
- International Announcement: WO2013/156978 WO 20131024
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/113 ; H01H59/00 ; B82Y15/00 ; H03H9/02 ; H03H9/24 ; B81B3/00

Abstract:
A junctionless Nano-Electro-Mechanical (NEM) resonator, comprising a highly doped conductive channel connecting a drain region and a source region; the conduction channel region is movable and the overall structure is fixed at least at these two ends placed on acting the source and drain regions, respectively; at least one fixed gate electrode arranged to control a depletion charge in the highly doped conductive channel thereby modulating dimensions of a cross-section of the highly doped conductive channel. A dimension of the cross-section in the direction of an electrical field that is oriented from the fixed gate electrode to the highly doped conductive channel, is designed in such a way that it can be reduced under the effect of the depletion charge such that a full depletion in the highly doped conductive channel is achievable with the control of the fixed gate electrode.
Public/Granted literature
- US20150137068A1 JUNCTIONLESS NANO-ELECTRO-MECHANICAL RESONANT TRANSISTOR Public/Granted day:2015-05-21
Information query
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