Invention Grant
- Patent Title: Methods and systems for bonding multiple wafers
- Patent Title (中): 用于粘合多个晶片的方法和系统
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Application No.: US14105257Application Date: 2013-12-13
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Publication No.: US09399596B1Publication Date: 2016-07-26
- Inventor: Hongqin Shi , Sandeep Giri , Amir Torkaman , Jamie Nam
- Applicant: Google Inc.
- Applicant Address: US CA Mountain View
- Assignee: Google Inc.
- Current Assignee: Google Inc.
- Current Assignee Address: US CA Mountain View
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L25/00 ; C03C27/10

Abstract:
The present disclosure provides methods and systems for bonding multiple wafers. An example system may include a sealable chamber with a first and second substantially vertical post positioned inside of the sealable chamber. The system may also include a first latch connected to the first post via a first pin, wherein the first pin allows the first latch to rotate about the first pin. The system may also include a second latch similarly configured to the first latch. The system may also include a base plate positioned between the first and second posts. The base plate is arranged such that when a first wafer rests on the base plate and a second wafer rests on the first and second latches, moving the base plate from a first position to a second position causes a top surface of the first wafer to contact a bottom surface of the second wafer.
Information query
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