Invention Grant
US09399813B2 TiAgN coating layer, TiAgN coating method and TiAgN coating apparatus
有权
TiAgN涂层，TiAgN涂层法，TiAgN涂层法等
- Patent Title: TiAgN coating layer, TiAgN coating method and TiAgN coating apparatus
- Patent Title (中): TiAgN涂层，TiAgN涂层法，TiAgN涂层法等
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Application No.: US13830250Application Date: 2013-03-14
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Publication No.: US09399813B2Publication Date: 2016-07-26
- Inventor: Woong Pyo Hong , In Woong Lyo , Hyuk Kang , Kwang Hoon Choi
- Applicant: Hyundai Motor Company
- Applicant Address: KR Seoul
- Assignee: Hyundai Motor Company
- Current Assignee: Hyundai Motor Company
- Current Assignee Address: KR Seoul
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Agent Peter F. Corless
- Priority: KR10-2012-0146054 20121214
- Main IPC: C01B21/00
- IPC: C01B21/00 ; C23C14/06 ; C01B21/076 ; C01B21/06 ; H01J37/32
Abstract:
Disclosed is a TiAgN coating layer, formed by subjecting a substrate having a surface roughness of about 0.05˜0.1 μm to plasma coating by periodically turning on/off an Ag source while a Ti source is continuously turned on in a nitrogen gas atmosphere, a TiAgN coating method, and a TiAgN coating apparatus.
Public/Granted literature
- US20140170051A1 TiAgN COATING LAYER, TiAgN COATING METHOD AND TiAgN COATING APPARATUS Public/Granted day:2014-06-19
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