Invention Grant
- Patent Title: Method and device for continuously coating substrates
- Patent Title (中): 连续涂布基材的方法和装置
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Application No.: US14131055Application Date: 2012-07-09
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Publication No.: US09399818B2Publication Date: 2016-07-26
- Inventor: Stefan Reber , Norbert Schillinger , David Pocza , Martin Arnold
- Applicant: Stefan Reber , Norbert Schillinger , David Pocza , Martin Arnold
- Applicant Address: DE Munich
- Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee Address: DE Munich
- Agency: Gesmer Updegrove LLP
- Priority: DE102011106859 20110707
- International Application: PCT/EP2012/063425 WO 20120709
- International Announcement: WO2013/004851 WO 20130110
- Main IPC: C23C16/54
- IPC: C23C16/54 ; C23C16/458 ; C23C16/44
Abstract:
The invention relates to a method for continuous coating of substrates, in which the substrates are transported continuously through a deposition chamber and, at the same time, measures are adopted for reducing parasitic deposits as well as possible. Likewise, the invention relates to a corresponding device for continuous coating of substrates.
Public/Granted literature
- US20140212583A1 METHOD AND DEVICE FOR CONTINUOUSLY COATING SUBSTRATES Public/Granted day:2014-07-31
Information query
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