Invention Grant
- Patent Title: Device for distance measurement
- Patent Title (中): 距离测量装置
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Application No.: US13916753Application Date: 2013-06-13
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Publication No.: US09400168B2Publication Date: 2016-07-26
- Inventor: Walter Huber , Ralph Joerger , Wolfgang Holzapfel
- Applicant: Dr. Johannes Heidenhain GmbH
- Applicant Address: DE Traunreut
- Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee Address: DE Traunreut
- Agency: Brinks Gilson & Lione
- Priority: DE102012210079 20120615; DE102013203211 20130227
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02

Abstract:
A device for interferential distance measurement that includes a measurement reflector having a surface and a light source emitting a beam parallel to the surface. The device includes a splitter element including a splitter grating that is disposed perpendicular to the surface, wherein the splitter grating receives the beam and splits the beam into a measurement beam and a reference beam, wherein the measurement beam acts at least twice upon the measurement reflector along a path of the measurement beam. The device including a combining element, at which the measurement beam and the reference beam enter into interferential superposition to form interfering measurement and reference beams. The device further includes a detector arrangement, by way of which a scanning signal pertaining to a distance between the measurement reflector and a component of said device in a measuring direction can be generated from the interfering measurement and reference beams.
Public/Granted literature
- US20130335746A1 DEVICE FOR DISTANCE MEASUREMENT Public/Granted day:2013-12-19
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