Invention Grant
- Patent Title: Angular velocity sensor and detection element used therein
- Patent Title (中): 角速度传感器和其中使用的检测元件
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Application No.: US14359785Application Date: 2012-11-16
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Publication No.: US09400180B2Publication Date: 2016-07-26
- Inventor: Kensaku Yamamoto
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Pearne & Gordon LLP
- Priority: JP2011-254557 20111122; JP2011-261399 20111130
- International Application: PCT/JP2012/007366 WO 20121116
- International Announcement: WO2013/076942 WO 20130530
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5642 ; H01L41/08 ; H01L41/09 ; G01C19/5621 ; G01C19/5747

Abstract:
A detection element has: first and second fixed parts; first and second vertical beams each connected at first and second ends to the first and second fixed parts, respectively; a horizontal beam connected at first and second ends to centers of the first and second vertical beams, respectively; and four arms each connected at a first end to the horizontal beam and having a weight formed on a second end. The first vertical beam has a first slit formed nearer the first fixed part with respect to its center, a second slit formed nearer the second fixed part with respect to its center, and a coupling portion between these slits. The second vertical beam has a third slit formed nearer the first fixed part with respect to its center, a fourth slit formed nearer the second fixed part with respect to its center, and a coupling portion between these slits.
Public/Granted literature
- US20140283602A1 ANGULAR VELOCITY SENSOR AND DETECTION ELEMENT USED THEREIN Public/Granted day:2014-09-25
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