Invention Grant
- Patent Title: Apparatus and method for cleaning photomask
- Patent Title (中): 用于清洁光掩模的设备和方法
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Application No.: US14255557Application Date: 2014-04-17
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Publication No.: US09400425B2Publication Date: 2016-07-26
- Inventor: Sung Ho Kwak , Min Young Cho
- Applicant: AP Systems Inc.
- Applicant Address: KR Hwaseong, Gyeonggi-Do
- Assignee: AP Systems Inc.
- Current Assignee: AP Systems Inc.
- Current Assignee Address: KR Hwaseong, Gyeonggi-Do
- Agency: Locke Lord LLP
- Agent Christopher J. Capelli; Daniel J. Fiorello
- Priority: KR10-2013-0059717 20130527
- Main IPC: B08B7/00
- IPC: B08B7/00 ; G03F1/82

Abstract:
This invention relates to an apparatus and method for cleaning a photomask. This apparatus, suitable for use in removing an adhesive residue from a photomask, includes a photomask disposed such that a surface thereof on which an adhesive residue is left behind is directed downwards, a metal plate formed adjacent to the adhesive residue, and a laser generator for irradiating a laser onto the metal plate so that the adhesive residue is removed by heat generated from the metal plate.
Public/Granted literature
- US20140345646A1 APPARATUS AND METHOD FOR CLEANING PHOTOMASK Public/Granted day:2014-11-27
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