Invention Grant
US09400425B2 Apparatus and method for cleaning photomask 有权
用于清洁光掩模的设备和方法

  • Patent Title: Apparatus and method for cleaning photomask
  • Patent Title (中): 用于清洁光掩模的设备和方法
  • Application No.: US14255557
    Application Date: 2014-04-17
  • Publication No.: US09400425B2
    Publication Date: 2016-07-26
  • Inventor: Sung Ho KwakMin Young Cho
  • Applicant: AP Systems Inc.
  • Applicant Address: KR Hwaseong, Gyeonggi-Do
  • Assignee: AP Systems Inc.
  • Current Assignee: AP Systems Inc.
  • Current Assignee Address: KR Hwaseong, Gyeonggi-Do
  • Agency: Locke Lord LLP
  • Agent Christopher J. Capelli; Daniel J. Fiorello
  • Priority: KR10-2013-0059717 20130527
  • Main IPC: B08B7/00
  • IPC: B08B7/00 G03F1/82
Apparatus and method for cleaning photomask
Abstract:
This invention relates to an apparatus and method for cleaning a photomask. This apparatus, suitable for use in removing an adhesive residue from a photomask, includes a photomask disposed such that a surface thereof on which an adhesive residue is left behind is directed downwards, a metal plate formed adjacent to the adhesive residue, and a laser generator for irradiating a laser onto the metal plate so that the adhesive residue is removed by heat generated from the metal plate.
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