Invention Grant
US09400428B2 Polymer compound, chemically amplified negative resist composition, photo-curable dry film and production method thereof, layered product, patterning process, and substrate
有权
高分子化合物,化学放大型负性抗蚀剂组合物,光固化型干膜及其制造方法,层叠体,图案化工序,基板等
- Patent Title: Polymer compound, chemically amplified negative resist composition, photo-curable dry film and production method thereof, layered product, patterning process, and substrate
- Patent Title (中): 高分子化合物,化学放大型负性抗蚀剂组合物,光固化型干膜及其制造方法,层叠体,图案化工序,基板等
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Application No.: US14311132Application Date: 2014-06-20
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Publication No.: US09400428B2Publication Date: 2016-07-26
- Inventor: Hiroyuki Urano , Masashi Iio , Katsuya Takemura , Takashi Miyazaki
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-174329 20130826
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/075 ; C08G77/16 ; G03F7/40 ; G03F7/26 ; C08G77/38 ; C08G77/42 ; C08G77/448 ; C08L83/04 ; C08L83/10 ; G03G5/05 ; G03G7/00 ; G03F7/038

Abstract:
A polymer compound includes a carboxyl group and a siloxane chain and is obtained in the presence of an acid catalyst by condensation of at least; (I) a siloxane compound having phenol groups at both terminals, as shown by formula (1), (II) phenols shown by formula (2) and/or phenols shown by formula (3), and (III) one or more kinds of aldehydes and ketones shown by the following general formula (4). The polymer compound can be used suitably as a base resin of a chemically amplified negative resist composition with which the problem of delamination generated on metal wires, an electrode, and a substrate, can be improved, and with which a fine pattern can be formed without generating a scum and a footing profile in the pattern bottom and on the substrate, using a widely used aqueous 2.38% TMAH solution as a developer.
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