Invention Grant
US09400794B2 Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus 有权
组管理装置,基板处理系统以及基板处理装置的文件管理方法

Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus
Abstract:
There is provided a group management apparatus connected to a substrate processing apparatus configured to store at least a configuration file, the group management apparatus including a controller configured to: receive a command for generating a file group for the configuration file; receive the configuration file and at least one associated file related to the configuration file from the substrate processing apparatus according to the command for generating the file group; and generate the file group including the configuration file and the associated file received from the substrate processing apparatus and store the file group in a state where an output is possible.
Information query
Patent Agency Ranking
0/0