Invention Grant
- Patent Title: Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus
- Patent Title (中): 组管理装置,基板处理系统以及基板处理装置的文件管理方法
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Application No.: US13944663Application Date: 2013-07-17
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Publication No.: US09400794B2Publication Date: 2016-07-26
- Inventor: Kazuhide Asai , Osamu Ueda , Hiroyuki Iwakura
- Applicant: Hitachi Kokusai Electric Inc.
- Applicant Address: JP Tokyo
- Assignee: Hitachi Kokusai Electric Inc.
- Current Assignee: Hitachi Kokusai Electric Inc.
- Current Assignee Address: JP Tokyo
- Agency: Edell, Shapiro & Finnan LLC
- Priority: JP2012-158891 20120717; JP2013-116104 20130531
- Main IPC: G06F17/30
- IPC: G06F17/30 ; G05B19/418

Abstract:
There is provided a group management apparatus connected to a substrate processing apparatus configured to store at least a configuration file, the group management apparatus including a controller configured to: receive a command for generating a file group for the configuration file; receive the configuration file and at least one associated file related to the configuration file from the substrate processing apparatus according to the command for generating the file group; and generate the file group including the configuration file and the associated file received from the substrate processing apparatus and store the file group in a state where an output is possible.
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Information query