Invention Grant
- Patent Title: Substrate treatment method
- Patent Title (中): 底物处理方法
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Application No.: US14803576Application Date: 2015-07-20
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Publication No.: US09401283B2Publication Date: 2016-07-26
- Inventor: Kenichiro Arai , Kazunari Nada
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2008-021776 20080131; JP2008-307995 20081202
- Main IPC: H01L21/306
- IPC: H01L21/306 ; H01L21/687 ; H01L21/67

Abstract:
A substrate treatment method includes the steps of: supporting a substrate with a support member; arranging an extension surface such that the extension surface laterally surrounds one major surface of the substrate supported by the support member and extends continuously to the major surface of the substrate supported by the support member; rotating the substrate supported by the support member; and etching the substrate by supplying an etching liquid onto the major surface of the substrate supported by the support member, wherein the extension surface has higher affinity for the etching liquid than the major surface of the substrate supported by the support member.
Public/Granted literature
- US20150325449A1 SUBSTRATE TREATMENT METHOD Public/Granted day:2015-11-12
Information query
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