Invention Grant
- Patent Title: Polishing apparatus and polishing method
- Patent Title (中): 抛光设备和抛光方法
-
Application No.: US13330881Application Date: 2011-12-20
-
Publication No.: US09401293B2Publication Date: 2016-07-26
- Inventor: Itsuki Kobata , Yoichi Kobayashi , Katsutoshi Ono , Masaki Kinoshita , Toshifumi Kimba
- Applicant: Itsuki Kobata , Yoichi Kobayashi , Katsutoshi Ono , Masaki Kinoshita , Toshifumi Kimba
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2010-289209 20101227
- Main IPC: B24B49/12
- IPC: B24B49/12 ; B24B37/10 ; B24B37/30 ; B24B37/013 ; H01L21/67 ; H01L21/687 ; B24B37/04 ; B24B37/005

Abstract:
A polishing apparatus for polishing a substrate includes a polishing table holding a polishing pad, a top ring configured to press the substrate against the polishing pad, and first and second optical heads each configured to apply the light to the substrate and to receive reflected light from the substrate. The polishing apparatus also includes spectroscopes each configured to measure at each wavelength an intensity of the reflected light received, and a processor configured to produce a spectrum indicating a relationship between intensity and wavelength of the reflected light. The first optical head is arranged so as to face a center of the substrate, and the second optical head is arranged so as to face a peripheral portion of the substrate.
Public/Granted literature
- US20120164917A1 POLISHING APPARATUS AND POLISHING METHOD Public/Granted day:2012-06-28
Information query