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US09401295B2 Load port apparatus and clamping device to be used for the same 有权
装载端口装置和夹紧装置用于相同

Load port apparatus and clamping device to be used for the same
Abstract:
To suppress deformation of a portion to be clamped even when a load applied to the portion to be clamped is increased at the time of fixing a front opening unified pod (FOUP), a clamping arm pivotable between a retracting position and a clamping position about a rotational axis inclined relative to a bottom surface of the FOUP is arranged. The clamping arm is housed in a housing depression so that the clamping arm at the retracting position is situated below a surface of a mount base, and at the clamping position, protrudes from the surface of the mount base and becomes engageable with the portion to be clamped.
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