Invention Grant
- Patent Title: Load port apparatus and clamping device to be used for the same
- Patent Title (中): 装载端口装置和夹紧装置用于相同
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Application No.: US13556611Application Date: 2012-07-24
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Publication No.: US09401295B2Publication Date: 2016-07-26
- Inventor: Tsutomu Okabe , Hiroshi Igarashi
- Applicant: Tsutomu Okabe , Hiroshi Igarashi
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-166584 20110729
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677

Abstract:
To suppress deformation of a portion to be clamped even when a load applied to the portion to be clamped is increased at the time of fixing a front opening unified pod (FOUP), a clamping arm pivotable between a retracting position and a clamping position about a rotational axis inclined relative to a bottom surface of the FOUP is arranged. The clamping arm is housed in a housing depression so that the clamping arm at the retracting position is situated below a surface of a mount base, and at the clamping position, protrudes from the surface of the mount base and becomes engageable with the portion to be clamped.
Public/Granted literature
- US20130028688A1 LOAD PORT APPARATUS AND CLAMPING DEVICE TO BE USED FOR THE SAME Public/Granted day:2013-01-31
Information query
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