Invention Grant
- Patent Title: Automated optical inspection of unit specific patterning
- Patent Title (中): 单位特定图案的自动光学检查
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Application No.: US14946464Application Date: 2015-11-19
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Publication No.: US09401313B2Publication Date: 2016-07-26
- Inventor: Craig Bishop , Vaibhav Joga Singh Bora , Christopher M. Scanlan , Timothy L. Olson
- Applicant: DECA Technologies Inc.
- Applicant Address: US AZ Tempe
- Assignee: DECA Technologies, Inc.
- Current Assignee: DECA Technologies, Inc.
- Current Assignee Address: US AZ Tempe
- Agency: Booth Udall Fuller, PLC
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01L21/66 ; H01L21/78 ; H01L23/544 ; H01L23/00 ; H01L21/768

Abstract:
A method of automated optical inspection (AOI) for a plurality of unique semiconductor packages can comprise providing a plurality of semiconductor die formed as a reconstituted wafer. A plurality of unit specific patterns can be formed by forming a unit specific pattern over each of the plurality of semiconductor die, wherein each of the unit specific patterns is customized to fit its respective semiconductor die. A plurality of images can be acquired by acquiring an image for each of the plurality of unit specific patterns. A plurality of unique reference standards can be created by creating a unique reference standard for each of the plurality of unit specific patterns. Defects can be detected in the plurality of unit specific patterns by comparing one of the plurality of unique reference standards to a corresponding one of the plurality of images for each of the plurality of unit specific patterns.
Public/Granted literature
- US20160141213A1 AUTOMATED OPTICAL INSPECTION OF UNIT SPECIFIC PATTERNING Public/Granted day:2016-05-19
Information query