Invention Grant
- Patent Title: Substrates with transferable chiplets
- Patent Title (中): 基底与可转移的小镊子
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Application No.: US14560679Application Date: 2014-12-04
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Publication No.: US09401344B2Publication Date: 2016-07-26
- Inventor: Christopher Bower , Joseph Carr
- Applicant: SEMPRIUS, INC.
- Applicant Address: US NC Durham
- Assignee: Semprius, Inc.
- Current Assignee: Semprius, Inc.
- Current Assignee Address: US NC Durham
- Agency: Myers Bigel & Sibley, P.A.
- Main IPC: H05K1/16
- IPC: H05K1/16 ; H01L23/00

Abstract:
A method for fabricating a substrate having transferable chiplets includes forming a photo-sensitive adhesive layer on a process side of a source substrate including active components or on a patterned side of a transparent intermediate substrate. The transparent intermediate substrate is brought into contact with the source substrate to adhere the active components on the process side to the patterned side of the transparent intermediate substrate via the photo-sensitive adhesive layer therebetween. Portions of the source substrate opposite the process side thereof are removed to singulate the active components. Portions of the photo-sensitive adhesive layer are selectively exposed to electromagnetic radiation through the transparent intermediate substrate to alter an adhesive strength thereof. Portions of the photo-sensitive adhesive layer having a weaker adhesive strength are selectively removed to define breakable tethers comprising portions of the adhesive layer having a stronger adhesive strength. The breakable tethers physically secure the active components to the transparent intermediate substrate. Related devices are also discussed.
Public/Granted literature
- US20150163906A1 Substrates with Transferable Chiplets Public/Granted day:2015-06-11
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