Invention Grant
- Patent Title: Nonvolatile memory cell with improved isolation structures
- Patent Title (中): 具有改进隔离结构的非易失性存储单元
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Application No.: US14501666Application Date: 2014-09-30
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Publication No.: US09401367B2Publication Date: 2016-07-26
- Inventor: Swen Wang
- Applicant: WaferTech, LLC
- Applicant Address: US WA Camas
- Assignee: WAFERTECH, LLC
- Current Assignee: WAFERTECH, LLC
- Current Assignee Address: US WA Camas
- Agency: Duane Morris LLP
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L27/115 ; H01L29/06 ; H01L29/10 ; H01L29/08 ; H01L29/167 ; H01L21/265 ; H01L21/28 ; H01L21/768

Abstract:
An array of floating gate transistors of a non-volatile memory, NVM, cell includes floating gate transistors separated from one another by high-concentration dopant impurity regions and without using shallow trench isolation (STI) or field oxide (FOX) isolation structures. The array is formed over a substrate portion that includes a continuous and planar upper surface. The high-concentration dopant impurity regions are formed in a P-field region and are formed of the same dopant impurity species as the P-field region but of a higher concentration. The floating gate transistors are split-gate floating gate transistors in some embodiments.
Public/Granted literature
- US20160093629A1 NONVOLATILE MEMORY CELL WITH IMPROVED ISOLATION STRUCTURES Public/Granted day:2016-03-31
Information query
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