Invention Grant
- Patent Title: Memory device and method for forming the same
- Patent Title (中): 存储装置及其形成方法
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Application No.: US14509429Application Date: 2014-10-08
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Publication No.: US09401368B2Publication Date: 2016-07-26
- Inventor: Zhongshan Hong , Yun Yang
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201310745799 20131230
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/423 ; H01L29/66 ; H01L21/28 ; H01L29/788 ; H01L21/3213 ; H01L21/311

Abstract:
Various embodiments provide memory devices and methods for forming the same. A substrate is provided, the substrate having one or more adjacent memory cells formed thereon. Each memory cell includes a gate structure, a control gate layer, and a first mask layer. A portion of the control gate layer is removed, to reduce a size of an exposed portion of the control gate layer in a direction parallel to a surface of the substrate. An electrical contact layer is formed on an exposed sidewall of the control gate layer and an exposed surface of the substrate. A barrier layer is formed on a sidewall of the memory cell. A conductive structure is formed on the substrate. The conductive structure has a significantly larger distance from control gate layer than from the gate structure, and the barrier layer forms an isolation layer between the conductive structure and the control gate layer.
Public/Granted literature
- US20150187781A1 MEMORY DEVICE AND METHOD FOR FORMING THE SAME Public/Granted day:2015-07-02
Information query
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