Invention Grant
- Patent Title: Non-volatile memory device and method for fabricating the same
- Patent Title (中): 非易失性存储器件及其制造方法
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Application No.: US13607243Application Date: 2012-09-07
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Publication No.: US09401370B2Publication Date: 2016-07-26
- Inventor: Sang-Moo Choi , Byung-Soo Park , Sang-Hyun Oh , Han-Soo Joo
- Applicant: Sang-Moo Choi , Byung-Soo Park , Sang-Hyun Oh , Han-Soo Joo
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2011-0139624 20111221
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/423

Abstract:
A three-dimensional non-volatile memory device that may increase erase operation efficiency during an erase operation using Gate-Induced Drain Leakage (GIDL) current and a method for fabricating the three-dimensional non-volatile memory device. The non-volatile memory device includes a channel structure formed over a substrate including a plurality of inter-layer dielectric layers and a plurality of channel layers that are alternately stacked, and a first selection gate and a second selection gate that are disposed on a first side and a second side of the channel structure, wherein the first selection gate and the second selection gate are disposed on sidewalls of the multiple channel layers, respectively, wherein a work function of a material forming the first selection gate is different from a work function of a material forming the second selection gate.
Public/Granted literature
- US20130161717A1 NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-06-27
Information query
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