Invention Grant
- Patent Title: Thin film transistor and active matrix organic light emitting diode assembly and method for manufacturing the same
- Patent Title (中): 薄膜晶体管和有源矩阵有机发光二极管组件及其制造方法
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Application No.: US14309562Application Date: 2014-06-19
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Publication No.: US09401376B2Publication Date: 2016-07-26
- Inventor: Chia-Che Hsu , Chia-Chi Huang , Wei-Ting Chen , Min-Ching Hsu
- Applicant: EverDisplay Optronics (Shanghai) Limited
- Applicant Address: CN Shanghai
- Assignee: EverDisplay Optronics (Shanghai) Limited
- Current Assignee: EverDisplay Optronics (Shanghai) Limited
- Current Assignee Address: CN Shanghai
- Agency: Eaton & Van Winkle
- Agent Yunling Ren
- Priority: CN201310251908 20130621
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/423 ; H01L29/49 ; H01L29/66 ; H01L29/786 ; H01L27/32

Abstract:
The present application provides a thin film transistor, an active matrix organic light emitting diode assembly and a method for manufacturing the same. The thin film transistor includes: a substrate; a buffer layer on the substrate; a semiconductor layer on the buffer layer, including a source region, a drain region and a channel region; a first gate insulating layer covering the semiconductor layer; a second gate insulating layer foot on the first gate insulating layer, a width of the second gate insulating layer foot being smaller than a width of the first gate insulating layer; and a gate electrode on the second gate insulating layer foot; wherein a part of the first gate insulating layer that is on the semiconductor layer has a flat upper surface. The present application may obtain better implantation profiles of source region and drain region, thereby obtaining better uniformity in TFT performance.
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