Invention Grant
US09401376B2 Thin film transistor and active matrix organic light emitting diode assembly and method for manufacturing the same 有权
薄膜晶体管和有源矩阵有机发光二极管组件及其制造方法

Thin film transistor and active matrix organic light emitting diode assembly and method for manufacturing the same
Abstract:
The present application provides a thin film transistor, an active matrix organic light emitting diode assembly and a method for manufacturing the same. The thin film transistor includes: a substrate; a buffer layer on the substrate; a semiconductor layer on the buffer layer, including a source region, a drain region and a channel region; a first gate insulating layer covering the semiconductor layer; a second gate insulating layer foot on the first gate insulating layer, a width of the second gate insulating layer foot being smaller than a width of the first gate insulating layer; and a gate electrode on the second gate insulating layer foot; wherein a part of the first gate insulating layer that is on the semiconductor layer has a flat upper surface. The present application may obtain better implantation profiles of source region and drain region, thereby obtaining better uniformity in TFT performance.
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