Invention Grant
- Patent Title: Infrared detector made up of suspended bolometric micro-plates
- Patent Title (中): 红外探测器由悬浮式空调微型板组成
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Application No.: US14354750Application Date: 2012-11-23
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Publication No.: US09401377B2Publication Date: 2016-07-26
- Inventor: Salim Boutami , Geoffroy Dumont , Jérome Hazart , Jean-Jacques Yon
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: St. Onge Steward Johnston & Reens, LLC
- Priority: FR1160895 20111129
- International Application: PCT/FR2012/052708 WO 20121123
- International Announcement: WO2013/079855 WO 20130606
- Main IPC: H01L27/144
- IPC: H01L27/144 ; H01L31/09 ; H01L31/18 ; G01J5/20 ; G01J5/08 ; G02B5/18 ; G01J5/02 ; H01L31/08

Abstract:
An array bolometric detector for detecting an electromagnetic radiation in a predetermined infrared or terahertz wavelength range, including a substrate, and an array of bolometric microplates for the detection of the radiation, suspended above the substrate by support elements. The detector includes a membrane arranged above each microplate, and having patterns having a refractive index smaller than that of the membrane formed therein. The patterns are placed periodically along at least one axis of the membrane, according to a period shorter than or equal to λ n , where λ is a wavelength to be detected and n is the average refractive index of the medium separating the microplate from the membrane. The width of the patterns along the axis increases from a central location of the membrane towards the periphery thereof.
Public/Granted literature
- US20140264712A1 INFRARED DETECTOR MADE UP OF SUSPENDED BOLOMETRIC MICRO-PLATES Public/Granted day:2014-09-18
Information query
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