Invention Grant
- Patent Title: Image sensor and manufacturing method thereof
- Patent Title (中): 图像传感器及其制造方法
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Application No.: US14529340Application Date: 2014-10-31
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Publication No.: US09401382B2Publication Date: 2016-07-26
- Inventor: Hiroyuki Sekine , Takayuki Ishino , Toru Ukita , Fuminori Tamura , Kazushige Takechi
- Applicant: NLT Technologies, Ltd.
- Applicant Address: JP Kawasaki
- Assignee: NLT TECHNOLOGIES, LTD.
- Current Assignee: NLT TECHNOLOGIES, LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Sughrue Mion, PLLC
- Priority: JP2013-231151 20131107
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L29/66 ; H01L29/786 ; H01L31/028 ; H01L31/20 ; H01L31/0232 ; H01L27/30 ; H01L27/32

Abstract:
Provided are an image sensor and a method of manufacturing method of manufacturing the image sensor. The image sensor includes a substrate, photoelectric transducers and switching elements formed in layers on the substrate in this order. Each of the photoelectric transducers includes a hydrogenated amorphous silicon layer. Each of the switching elements includes an amorphous oxide semiconductor layer. The image sensor further includes a blocking layer arranged between the hydrogenated amorphous silicon layers of the photoelectric transducers and the amorphous oxide semiconductor layers of the switching elements, where the blocking layer suppresses penetration of hydrogen separated from the hydrogenated amorphous silicon layers.
Public/Granted literature
- US20150123119A1 IMAGE SENSOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2015-05-07
Information query
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