Invention Grant
- Patent Title: Confined early epitaxy with local interconnect capability
- Patent Title (中): 具有局部互连能力的封闭早期外延
-
Application No.: US14676608Application Date: 2015-04-01
-
Publication No.: US09401408B2Publication Date: 2016-07-26
- Inventor: Ruilong Xie , Andreas Knorr
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Wayne F. Reinke
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/786 ; H01L21/8238 ; H01L29/417 ; H01L29/78 ; H01L29/66 ; H01L29/06 ; H01L21/28 ; H01L21/768 ; H01L27/088

Abstract:
A non-planar semiconductor structure includes a semiconductor substrate, multiple raised semiconductor structures coupled to the substrate and surrounded at a lower portion thereof by a layer of isolation material, gate structure(s) and confined epitaxial material above active regions of the raised structures, the confined epitaxial material having recessed portion(s) therein. Dummy gate structures surrounding a portion of each of the raised structures are initially used, and the confined epitaxial material is created before replacing the dummy gate structures with final gate structures. The structure further includes silicide on upper surfaces of a top portion of the confined epitaxial material, and contacts above the silicide, the contacts including separate contacts electrically coupled to only one area of confined epitaxial material and common contact(s) electrically coupling two adjacent areas of the confined epitaxial material.
Public/Granted literature
- US20160190262A1 CONFINED EARLY EPITAXY WITH LOCAL INTERCONNECT CAPABILITY Public/Granted day:2016-06-30
Information query
IPC分类: