Invention Grant
US09401418B2 Method of manufacturing thin film transistor and organic light emitting diode display
有权
制造薄膜晶体管和有机发光二极管显示器的方法
- Patent Title: Method of manufacturing thin film transistor and organic light emitting diode display
- Patent Title (中): 制造薄膜晶体管和有机发光二极管显示器的方法
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Application No.: US14366866Application Date: 2014-04-28
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Publication No.: US09401418B2Publication Date: 2016-07-26
- Inventor: Xiaowen Lv , Chihyuan Tseng
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Shenzhen, Guangdong
- Agency: Brooks Kushman P.C.
- Priority: CN201410165431 20140423
- International Application: PCT/CN2014/076407 WO 20140428
- International Announcement: WO2015/161523 WO 20151029
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/32 ; H01L21/02 ; H01L21/311 ; H01L29/786 ; H01L21/027

Abstract:
A method of manufacturing transistor having a first and second thin film transistor by creating the second thin film transistor by forming a second gate of the second thin film transistor on a substrate, depositing an insulating layer and a semiconductor layer in order to cover the second gate. A photoresist layer is deposited above the semiconductor layer and exposed. The semiconductor layer and the insulating layer are etched, thereby forming a second active layer of the second thin film transistor and a first connection window disposed above the second gate. A second source and a second drain of the second thin film transistor is deposited above the insulating layer and the second active layer. The present method enables the manufacturing of an organic light emitting diode display. The method reduces the times of using a photomask, thereby saving the manufacture time, improving the productivity and economizing the manufacture cost.
Public/Granted literature
- US20150311322A1 METHOD OF MANUFACTURING THIN FILM TRANSISTOR AND ORGANIC LIGHT EMITTING DIODE DISPLAY Public/Granted day:2015-10-29
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