Invention Grant
- Patent Title: Back-illuminated image sensor with dishing depression surface
- Patent Title (中): 具有凹陷凹陷表面的背照式图像传感器
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Application No.: US13517858Application Date: 2012-06-14
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Publication No.: US09401441B2Publication Date: 2016-07-26
- Inventor: Tseng-Fei Wen
- Applicant: Tseng-Fei Wen
- Applicant Address: TW Hsinchu
- Assignee: UNITED MICROELECTRONICS CORPORATION
- Current Assignee: UNITED MICROELECTRONICS CORPORATION
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, PC
- Agent Justin King
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L31/0232 ; H01L27/146

Abstract:
A fabricating method of a back-illuminated image sensor includes the following steps. First, a silicon wafer having a first surface and a second surface is provided, wherein a number of trench isolations are formed in the first surface, and at least one image sensing member is formed between the trench isolations. Then, a first chemical mechanical polishing (CMP) process is performed to the second surface using the trench isolations as a polishing stop layer to thin the silicon wafer. Because the polishing rate of the silicon material in the silicon wafer is different with that of the isolation material of the trench isolations in the first CMP process, at least one dishing depression is formed in the second surface of the silicon wafer. Finally, a microlens is formed above the dishing depression, and a surface of the microlens facing the dishing depression is a curved surface.
Public/Granted literature
- US20130334636A1 BACK-ILLUMINATED IMAGE SENSOR AND FABRICATING METHOD THEREOF Public/Granted day:2013-12-19
Information query
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