Invention Grant
- Patent Title: Apparatus for manufacturing an inorganic thin-film solar cell, and method for controlling same
- Patent Title (中): 无机薄膜太阳能电池的制造装置及其控制方法
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Application No.: US13984954Application Date: 2012-02-09
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Publication No.: US09401449B2Publication Date: 2016-07-26
- Inventor: Jung Jae Park , Do Yeon Kim , Jong Gun Lee , Min Wook Lee , Suk Goo Yoon
- Applicant: Jung Jae Park , Do Yeon Kim , Jong Gun Lee , Min Wook Lee , Suk Goo Yoon
- Applicant Address: KR Seoul
- Assignee: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
- Current Assignee: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
- Current Assignee Address: KR Seoul
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2011-0012063 20110210; KR10-2012-0005920 20120118
- International Application: PCT/KR2012/000972 WO 20120209
- International Announcement: WO2012/108704 WO 20120816
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/032 ; H01L31/0749 ; H01L31/20 ; C23C24/04 ; H01L21/02
Abstract:
The present invention relates to an apparatus for manufacturing an inorganic thin-film solar cell, the apparatus including: a substrate stage which is mounted in a chamber and in which a solar cell substrate is disposed; and an inorganic powder supply unit including a nozzle configured to discharge an inorganic powder aerosol containing an inorganic powder onto the substrate stage in a supersonic flow so as to form a solar cell layer on the solar cell substrate, and an inorganic powder supply portion configured to supply the inorganic powder aerosol to the nozzle.
Public/Granted literature
- US20140030825A1 APPARATUS FOR MANUFACTURING AN INORGANIC THIN-FILM SOLAR CELL, AND METHOD FOR CONTROLLING SAME Public/Granted day:2014-01-30
Information query
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