Invention Grant
- Patent Title: Method for manufacturing transistor and transistor
- Patent Title (中): 制造晶体管和晶体管的方法
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Application No.: US14178651Application Date: 2014-02-12
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Publication No.: US09401478B2Publication Date: 2016-07-26
- Inventor: Shohei Koizumi , Takashi Sugizaki , Kenji Miyamoto
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2011-177424 20110815
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/10 ; H01L51/05

Abstract:
A method for manufacturing a transistor includes: forming a base film for supporting a catalyst for electroless plating; forming a resist layer having an opening portion corresponding to source and drain electrodes onto the base film; causing the base film within the opening portion to support the catalyst for electroless plating and performing a first electroless plating; removing the resist layer; performing a second electroless plating on a surface of an electrode which is formed by the first electroless plating and forming the source and drain electrodes; and forming a semiconductor layer in contact with surfaces of the source and drain electrodes, the surfaces facing each other, wherein an energy level difference between a work function of a material which is used for the second electroless plating and an energy level of a molecular orbital which is used for electron transfer in a material of the semiconductor layer is less than an energy level difference between a work function of a material which is used for the first electroless plating and the energy level of the molecular orbital.
Public/Granted literature
- US20140183506A1 METHOD FOR MANUFACTURING TRANSISTOR AND TRANSISTOR Public/Granted day:2014-07-03
Information query
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