Invention Grant
- Patent Title: Laser structure on silicon using aspect ratio trapping growth
- Patent Title (中): 激光结构在硅上使用纵横比捕获生长
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Application No.: US14672299Application Date: 2015-03-30
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Publication No.: US09401583B1Publication Date: 2016-07-26
- Inventor: Cheng-Wei Cheng , Effendi Leobandung , Ning Li , Devendra K. Sadana , Kuen-Ting Shiu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Andrew G. Wakim; Louis J. Percello
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01S5/323 ; H01S5/026 ; H01S5/32

Abstract:
A method of forming a laser on silicon using aspect ratio trapping (ART) growth. The method may include; forming a first insulator layer on a substrate; etching a trench in the first insulator layer exposing a top surface of the substrate; forming a buffer layer in the trench using ART growth; forming a laser on the buffer layer, the laser includes at least an active region and a top cladding layer; and forming a top contact on the top cladding layer and a bottom contact on the substrate.
Information query
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