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US09401583B1 Laser structure on silicon using aspect ratio trapping growth 有权
激光结构在硅上使用纵横比捕获生长

Laser structure on silicon using aspect ratio trapping growth
Abstract:
A method of forming a laser on silicon using aspect ratio trapping (ART) growth. The method may include; forming a first insulator layer on a substrate; etching a trench in the first insulator layer exposing a top surface of the substrate; forming a buffer layer in the trench using ART growth; forming a laser on the buffer layer, the laser includes at least an active region and a top cladding layer; and forming a top contact on the top cladding layer and a bottom contact on the substrate.
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