Invention Grant
- Patent Title: Methods and apparatus for temperature control of devices and mechanical resonating structures
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Application No.: US13779416Application Date: 2013-02-27
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Publication No.: US09401693B2Publication Date: 2016-07-26
- Inventor: Klaus Juergen Schoepf , Reimund Rebel
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H03H9/08
- IPC: H03H9/08 ; H03H9/15 ; H03H9/02 ; H03H9/10 ; H03H9/24
Abstract:
Methods and apparatus for temperature control of devices and mechanical resonating structures are described. A mechanical resonating structure may include a heating element and a temperature sensor. The temperature sensor may sense the temperature of the mechanical resonating structure, and the heating element may be adjusted to provide a desired level of heating. Optionally, additional heating elements and/or temperature sensors may be included.
Public/Granted literature
- US20140062262A1 METHODS AND APPARATUS FOR TEMPERATURE CONTROL OF DEVICES AND MECHANICAL RESONATING STRUCTURES Public/Granted day:2014-03-06
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