Invention Grant
- Patent Title: Scanning operation with concurrent focus and inspection
- Patent Title (中): 扫描操作同时进行重点检查
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Application No.: US13651583Application Date: 2012-10-15
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Publication No.: US09402036B2Publication Date: 2016-07-26
- Inventor: Robert Bishop , Timothy Pinkney
- Applicant: Stella Alliance, LLC
- Applicant Address: US MA Wilmington
- Assignee: Rudolph Technologies, Inc.
- Current Assignee: Rudolph Technologies, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Larkin Hoffman Daly & Lindgren, Ltd.
- Agent Todd R. Fronek
- Main IPC: H04N9/47
- IPC: H04N9/47 ; H04N7/18 ; H04N5/235 ; G01N21/64 ; G01N21/956 ; G01N21/95 ; G01N21/88
Abstract:
A method and apparatus for optimizing inspection high-speed optical inspection of parts using intelligent image analysis to determine optimal focus using high numerical aperture (NA) optics, achieve a superior signal-to-noise ratio, resolution, and inspection speed performance with very limited depth of field lenses.
Public/Granted literature
- US20130100276A1 High Speed Autofocus System Public/Granted day:2013-04-25
Information query
