Invention Grant
- Patent Title: Polishing apparatus and polishing method
- Patent Title (中): 抛光设备和抛光方法
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Application No.: US13905763Application Date: 2013-05-30
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Publication No.: US09403255B2Publication Date: 2016-08-02
- Inventor: Makoto Fukushima , Hozumi Yasuda , Keisuke Namiki , Osamu Nabeya , Shingo Togashi , Satoru Yamaki
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2012-124663 20120531; JP2012-279751 20121221
- Main IPC: B24B37/32
- IPC: B24B37/32 ; B24B37/005 ; B24B37/07 ; B24B37/04 ; B24B7/22 ; B24B49/16

Abstract:
A polishing apparatus polishes a substrate by bringing the substrate into sliding contact with a polishing surface. The polishing apparatus includes: a substrate holder having a substrate holding surface configured to press the substrate against the polishing surface, a retaining ring coupled to the substrate holding surface and configured to surround the substrate, wherein the retaining ring is brought into contact with the polishing surface during operation of the polishing apparatus, the retaining ring being configured to be tiltable independently of the substrate holding surface; a rotating mechanism configured to rotate the substrate holder about its own axis; and at least one local load exerting mechanism configured to exert a local load on a part of the retaining ring in a direction perpendicular to the polishing surface, the at least one local load exerting mechanism being arranged so as not to move in accordance with the substrate holder.
Public/Granted literature
- US20130324012A1 POLISHING APPARATUS AND POLISHING METHOD Public/Granted day:2013-12-05
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