Invention Grant
- Patent Title: Recording measurements by sensors for a carrier head
- Patent Title (中): 通过传感器记录载波头的测量
-
Application No.: US14081307Application Date: 2013-11-15
-
Publication No.: US09403256B2Publication Date: 2016-08-02
- Inventor: Simon Yavelberg
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: H01L21/306
- IPC: H01L21/306 ; B24B37/005 ; B24B37/30 ; B24B7/22
Abstract:
A pressure control assembly for a carrier head of a polishing apparatus includes a pressure supply line configured to fluidically connect to a chamber of a carrier head, a sensor to responsive to pressure in the chamber and configured to generate a signal representative of the pressure, and a pneumatic control unit configured to receive the signal, to control a pressure applied to the pressure supply line, and to record the signal in a non-transitory storage media of a storage device removably attached to the pneumatic control unit.
Public/Granted literature
- US20140138355A1 Recording Measurements by Sensors for a Carrier Head Public/Granted day:2014-05-22
Information query
IPC分类:
