Invention Grant
- Patent Title: Apparatus and method for double-side polishing of work
- Patent Title (中): 双面抛光工作的装置和方法
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Application No.: US14460846Application Date: 2014-08-15
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Publication No.: US09403257B2Publication Date: 2016-08-02
- Inventor: Tomonori Miura , Hiroto Fukushima
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2013-180034 20130830
- Main IPC: B24B37/013
- IPC: B24B37/013 ; B24B37/08 ; B24B49/04 ; B24B47/12 ; B24B49/12

Abstract:
A double-side polishing apparatus for a work according to the present invention includes one or more work thickness measuring devices and a control unit. The double-side polishing method for a work includes the steps of: first polishing for polishing both surfaces of the work; first measurement for measuring the thickness of the work; in the first measurement step, when the thickness of the work is found to reach the predetermined thickness, terminating the orbital motion of the carrier plate; second polishing both surfaces of the work while the carrier plate performs only rotational motion; second measurement for measuring the thickness of the work at predetermined position(s); and determining a time for terminating polishing based on the result of the measurement of the thickness of the work in the second measurement step.
Public/Granted literature
- US20150065010A1 APPARATUS AND METHOD FOR DOUBLE-SIDE POLISHING OF WORK Public/Granted day:2015-03-05
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