Invention Grant
- Patent Title: Calibration of MEMS sensor
- Patent Title (中): MEMS传感器的校准
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Application No.: US14116092Application Date: 2011-06-30
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Publication No.: US09403671B2Publication Date: 2016-08-02
- Inventor: Brian D. Homeijer , Robert Newton Bicknell
- Applicant: Brian D. Homeijer , Robert Newton Bicknell
- Applicant Address: US TX Houston
- Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee Address: US TX Houston
- Agent Michael A. Dryja
- International Application: PCT/US2011/042724 WO 20110630
- International Announcement: WO2013/002809 WO 20130103
- Main IPC: G01C25/00
- IPC: G01C25/00 ; G01P21/00 ; G01V13/00 ; B81B3/00 ; G01V1/16 ; G01H11/00 ; B81C99/00
Abstract:
A micro electromechanical systems (MEMS) sensor is excited. The response of the MEMS sensor is measured. The MEMS sensor is calibrated.
Public/Granted literature
- US20140083164A1 CALIBRATION OF MEMS SENSOR Public/Granted day:2014-03-27
Information query
