Invention Grant
- Patent Title: Sintered objects and processes for producing same
- Patent Title (中): 烧结体及其制造方法
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Application No.: US13577585Application Date: 2011-02-08
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Publication No.: US09403722B2Publication Date: 2016-08-02
- Inventor: Kazuto Ando , Shintaro Hayashi , Hirokuni Kugimoto , Masayuki Ishizuka
- Applicant: Kazuto Ando , Shintaro Hayashi , Hirokuni Kugimoto , Masayuki Ishizuka
- Applicant Address: JP
- Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee Address: JP
- Agency: Merchant & Gould P.C.
- Priority: JP2010-026817 20100209; JP2010-149324 20100630; JP2011-007809 20110118; JP2011-012861 20110125
- International Application: PCT/JP2011/052598 WO 20110208
- International Announcement: WO2011/099466 WO 20110818
- Main IPC: H01B1/02
- IPC: H01B1/02 ; H01B1/06 ; C04B35/505 ; C09K5/00 ; C04B35/64 ; C04B35/626 ; C04B35/645 ; C04B35/80 ; B82Y30/00 ; H01J37/32

Abstract:
Provided is a sintered object which has excellent resistance to corrosion by corrosive halogen gases and by the plasmas thereof and has excellent thermal conductivity and excellent electrical conductivity. The sintered object has few limitations on design, is usable in a wide range of applications, and is highly versatile. The sintered object has no frequency dependence when a high-frequency voltage is applied thereto and with which it is possible to actualize the stability of a plasma. Also provided is a method for producing the sintered object. Furthermore provided is a high-frequency transmission material which has direct-current electrical conductivity for reducing fluctuations in plasma potential and has capacitive properties that enable the material to transmit high-frequency power necessary for plasma excitation, and which has no fear of causing contamination of a sample with a metal and has resistance to corrosion by plasmas.
Public/Granted literature
- US20120298910A1 SINTERED OBJECTS AND PROCESSES FOR PRODUCING SAME Public/Granted day:2012-11-29
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