Invention Grant
- Patent Title: Manufacturing method of group 13 nitride crystal
- Patent Title (中): 13族氮化物晶体的制造方法
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Application No.: US13592555Application Date: 2012-08-23
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Publication No.: US09404196B2Publication Date: 2016-08-02
- Inventor: Masahiro Hayashi , Seiji Sarayama , Takashi Satoh , Hiroshi Nambu , Chiharu Kimura , Naoya Miyoshi
- Applicant: Masahiro Hayashi , Seiji Sarayama , Takashi Satoh , Hiroshi Nambu , Chiharu Kimura , Naoya Miyoshi
- Applicant Address: JP Tokyo
- Assignee: RICOH COMPANY, LTD.
- Current Assignee: RICOH COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2011-201206 20110914
- Main IPC: C30B9/10
- IPC: C30B9/10 ; C30B9/12 ; C30B29/40

Abstract:
A method of manufacturing a group 13 nitride crystal includes a crystal growth process to form the group 13 nitride crystal by growing the group 13 nitride crystal having a hexagonal crystal structure from a seed crystal which is a gallium nitride crystal having a hexagonal crystal structure in which a length “L” in a c-axis direction is 9.7 mm or more, and a ratio L/d of the length “L” to a crystal diameter “d” in a c-plane is larger than 0.813. The crystal growth process includes a process of forming an outer periphery containing a {10-10} plane and an outer periphery containing a {10-11} plane at side surfaces of the group 13 nitride crystal, and forming an outer periphery containing a {0001} plane at a bottom surface of the group 13 nitride crystal.
Public/Granted literature
- US20130061799A1 MANUFACTURING METHOD OF GROUP 13 NITRIDE CRYSTAL Public/Granted day:2013-03-14
Information query
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