Invention Grant
US09404828B2 Leak test method and leak test apparatus 有权
泄漏试验方法和泄漏试验装置

Leak test method and leak test apparatus
Abstract:
A leak test method includes: reducing first pressure in an inspection space in a work and second pressure in a space in a master chamber; humidifying the inspection space in the work; and detecting a change in differential pressure between the inspection space in the work and the space in the master chamber, while the inspection space in the work is in a water-vapor saturated state. Also, in this leak test method, a leak in the inspection space in the work is detected from the change in the differential pressure.
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