Invention Grant
- Patent Title: Microelectromechanical transducer and test system
- Patent Title (中): 微机电传感器和测试系统
-
Application No.: US13685254Application Date: 2012-11-26
-
Publication No.: US09404841B2Publication Date: 2016-08-02
- Inventor: Yunje Oh , Syed Amanula Syed Asif , Oden Warren
- Applicant: Hysitron Incorporated
- Applicant Address: US MN Eden Prairie
- Assignee: Hysitron, Inc.
- Current Assignee: Hysitron, Inc.
- Current Assignee Address: US MN Eden Prairie
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: G01N3/48
- IPC: G01N3/48 ; G01N3/40 ; G01Q60/36 ; G01N3/42 ; G01N19/00 ; G01B7/34

Abstract:
A microelectromechanical transducer and test system is disclosed. One embodiment includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe.
Public/Granted literature
- US20130098144A1 MICROELECTROMECHANICAL TRANSDUCER AND TEST SYSTEM Public/Granted day:2013-04-25
Information query