Invention Grant
- Patent Title: Inspection apparatus and inspection method
- Patent Title (中): 检验仪器和检验方法
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Application No.: US14667648Application Date: 2015-03-24
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Publication No.: US09404874B2Publication Date: 2016-08-02
- Inventor: Hidetoshi Nakanishi , Akira Ito , Iwao Kawayama , Masayoshi Tonouchi
- Applicant: SCREEN Holdings Co., Ltd. , OSAKA UNIVERSITY
- Applicant Address: JP Kyoto
- Assignee: SCREEN HOLDINGS, CO., LTD.
- Current Assignee: SCREEN HOLDINGS, CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: McDermott Will & Emery LLP
- Priority: JP2014-061679 20140325
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G01N21/95
Abstract:
An inspection apparatus according to an aspect of the present invention inspects a solar cell that is of a photo device. The inspection apparatus includes: an irradiation part that irradiates the solar cell with pulse light emitted from a femtosecond laser that is of a light source; an electromagnetic wave detection part that detects an electromagnetic wave pulse emitted from the solar cell in response to the irradiation of the solar cell with the pulse light; and a PL light detection part that detects photoluminescence light generated in the solar cell in response to the irradiation of the solar cell with the pulse light.
Public/Granted literature
- US20150276607A1 INSPECTION APPARATUS AND INSPECTION METHOD Public/Granted day:2015-10-01
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