Invention Grant
US09405020B2 Scintillator panel manufacturing method, scintillator panel, and radiation detector
有权
闪烁面板制造方法,闪烁体面板和辐射探测器
- Patent Title: Scintillator panel manufacturing method, scintillator panel, and radiation detector
- Patent Title (中): 闪烁面板制造方法,闪烁体面板和辐射探测器
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Application No.: US14759739Application Date: 2013-11-05
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Publication No.: US09405020B2Publication Date: 2016-08-02
- Inventor: Masanori Yamashita , Yutaka Kusuyama , Shintaro Toyama , Hirotake Osawa , Katsuhiko Suzuki
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2013-001908 20130109
- International Application: PCT/JP2013/079914 WO 20131105
- International Announcement: WO2014/109116 WO 20140717
- Main IPC: G01T1/20
- IPC: G01T1/20 ; G01T1/202 ; H01L27/146 ; G21K4/00

Abstract:
Provided is a method of manufacturing a scintillator panel configured to convert radiation into scintillation light, the method including a first process of forming a plurality of convex sections that protrude from a rear surface toward a front surface of the substrate in a predetermined direction and concave section defined by the convex sections on the front surface of the substrate having the front surface and the rear surface, a second process of forming first scintillator units respectively extending from the convex sections of the substrate in the predetermined direction through crystal growth of a columnar crystal of a scintillator material, and a third process of radiating a laser beam to contact portions of the first scintillator units extending from the adjacent convex sections and separating the first scintillator units extending from the adjacent convex sections by scanning the concave section with the laser beam.
Public/Granted literature
- US20150355342A1 SCINTILLATOR PANEL MANUFACTURING METHOD, SCINTILLATOR PANEL, AND RADIATION DETECTOR Public/Granted day:2015-12-10
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