Invention Grant
US09405063B2 Integrated metal grating 有权
集成金属光栅

Integrated metal grating
Abstract:
An integrated circuit includes a substrate, a metal grating disposed over the substrate, and a waveguide layer disposed over or under the metal grating. The metal grating is arranged to change a propagation direction of an optical signal and the waveguide layer is arranged to guide the optical signal to a desired direction.
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