Invention Grant
US09405189B2 Self-assembled structures, method of manufacture thereof and articles comprising the same
有权
自组装结构,其制造方法和包含该组合结构的制品
- Patent Title: Self-assembled structures, method of manufacture thereof and articles comprising the same
- Patent Title (中): 自组装结构,其制造方法和包含该组合结构的制品
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Application No.: US14020371Application Date: 2013-09-06
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Publication No.: US09405189B2Publication Date: 2016-08-02
- Inventor: Sangho Cho , Guorong Sun , Karen L. Wooley , James W. Thackeray , Peter Trefonas, III
- Applicant: The Texas A&M University System , Rohm and Haas Electronic Materials LLC
- Applicant Address: US MA Marlborough US TX College Station
- Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC,THE TEXAS A&M UNIVERSITY SYSTEM
- Current Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC,THE TEXAS A&M UNIVERSITY SYSTEM
- Current Assignee Address: US MA Marlborough US TX College Station
- Agency: Cantor Colburn LLP
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/038 ; G03F7/004 ; G03F7/075 ; C08F293/00 ; C08G61/08 ; C09D165/00 ; C08L65/00

Abstract:
Disclosed herein is a photoresist composition comprising a graft block copolymer; a solvent and a photoacid generator; where the graft block copolymer comprises a first block polymer; the first block polymer comprising a backbone polymer and a first graft polymer; where the first graft polymer comprises a surface energy reducing moiety that comprises a halocarbon moiety or a silicon containing moiety; and a second block polymer; the second block polymer being covalently bonded to the first block; wherein the second block comprises the backbone polymer and a second graft polymer; where the second graft polymer comprises a functional group that is operative to undergo deprotection and alter the solubility of the graft block copolymer; where the graft block copolymer has a bottle brush topology.
Public/Granted literature
- US20150072292A1 SELF-ASSEMBLED STRUCTURES, METHOD OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME Public/Granted day:2015-03-12
Information query
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