Invention Grant
- Patent Title: Optical system of a microlithographic projection exposure apparatus
- Patent Title (中): 微光刻投影曝光装置的光学系统
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Application No.: US14737965Application Date: 2015-06-12
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Publication No.: US09405202B2Publication Date: 2016-08-02
- Inventor: Ingo Saenger , Christoph Hennerkes
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102013201133 20130124
- Main IPC: G03B27/28
- IPC: G03B27/28 ; G03B27/54 ; G03F7/20

Abstract:
The invention relates to an optical system of a microlithographic projection exposure apparatus, comprising at least one mirror arrangement having a plurality of mirror elements which are adjustable independently of one another for the purpose of changing an angular distribution of the light reflected by the mirror arrangement, and a polarization-influencing optical element, which generates, for impinging light having a constantly linear or a circular input polarization distribution, an output polarization distribution having a direction of polarization that varies continuously over the light beam cross section.
Public/Granted literature
- US20150277235A1 OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2015-10-01
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