Invention Grant
- Patent Title: Method for making ultra-narrow read sensor and read transducer device resulting therefrom
- Patent Title (中): 制造超窄读取传感器和读取传感器装置的方法
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Application No.: US13929633Application Date: 2013-06-27
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Publication No.: US09406331B1Publication Date: 2016-08-02
- Inventor: Miao Wang , Wei Gao , Xiaoyu Yang , Anup G. Roy , Wei Zhang , Wencheng Su , Zhihong Zhang , James Yuan , Guanxiong Li , Ming Mao , Hai Sun , Lingyun Miao
- Applicant: Western Digital (Fremont), LLC
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: B44C1/22
- IPC: B44C1/22 ; G11B5/84 ; G11B5/127
Abstract:
Disclosed are methods for making ultra-narrow track width (TW) read sensors, and read transducers incorporating such sensors. The methods utilize side-wall line patterning techniques to prepare ultra-narrow mill masks that can be used to prepare the ultra-narrow read sensors.
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