Invention Grant
US09406483B1 Method and device for characterizing an electron beam using an X-ray detector with a patterned aperture resolver and patterned aperture modulator
有权
使用具有图案化孔径分解器和图案化孔径调制器的X射线检测器来表征电子束的方法和装置
- Patent Title: Method and device for characterizing an electron beam using an X-ray detector with a patterned aperture resolver and patterned aperture modulator
- Patent Title (中): 使用具有图案化孔径分解器和图案化孔径调制器的X射线检测器来表征电子束的方法和装置
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Application No.: US14973244Application Date: 2015-12-17
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Publication No.: US09406483B1Publication Date: 2016-08-02
- Inventor: Tomas Lock
- Applicant: Arcam AB
- Applicant Address: SE Moelndal
- Assignee: Arcam AB
- Current Assignee: Arcam AB
- Current Assignee Address: SE Moelndal
- Agency: Alston & Bird LLP
- Main IPC: A61N5/00
- IPC: A61N5/00 ; H01J37/304 ; H01J37/30 ; H01J37/317
Abstract:
A device for detecting X-rays radiated out of a substrate surface, said device comprising at least one X-ray detector, a resolver grating and a modulator grating, said resolver grating with at least one opening facing towards said X-ray detector is arranged in front of said X-ray detector. Said modulator grating is provided between said resolver grating and said substrate at a predetermined distance from said resolver grating and said substrate, where said modulator grating having a plurality of openings in at least a first direction, wherein said x-rays from said surface is spatially modulated with said modulator grating and resolver grating.
Public/Granted literature
- US20160211119A1 METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM Public/Granted day:2016-07-21
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