Invention Grant
- Patent Title: Group III nitride semiconductor light-emitting device and production method therefor
- Patent Title (中): III族氮化物半导体发光器件及其制造方法
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Application No.: US14800035Application Date: 2015-07-15
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Publication No.: US09406514B2Publication Date: 2016-08-02
- Inventor: Koji Okuno
- Applicant: TOYODA GOSEI CO., LTD.
- Applicant Address: JP Kiyosu-Shi, Aichi-Ken
- Assignee: TOYODA GOSEI CO., LTD.
- Current Assignee: TOYODA GOSEI CO., LTD.
- Current Assignee Address: JP Kiyosu-Shi, Aichi-Ken
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2014-147841 20140718
- Main IPC: H01L21/205
- IPC: H01L21/205 ; H01L33/32 ; H01L33/00

Abstract:
The present invention provides a Group III nitride semiconductor light-emitting device having a low drive voltage and a production method therefor. A p-type semiconductor layer formation step comprises a p-type cladding layer formation step of forming a p-side superlattice layer on a light-emitting layer by supplying a first raw material gas containing at least a Group III element and a dopant gas, a p-type intermediate layer formation step of forming a p-type intermediate layer on the p-side superlattice layer by supplying a first raw material gas and a dopant gas, a dopant gas supply step of supplying the dopant gas while stopping the supply of the first raw material gas after the p-type intermediate layer formation step, and a p-type contact layer formation step of forming a p-type contact layer on the p-type intermediate layer by supplying a first raw material gas and a dopant gas after the dopant gas supply step.
Public/Granted literature
- US20160020361A1 GROUP III NITRIDE SEMICONDUCTOR LIGHT-EMITTING DEVICE AND PRODUCTION METHOD THEREFOR Public/Granted day:2016-01-21
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