Invention Grant
US09406619B2 Semiconductor device including pre-fabricated shielding frame disposed over semiconductor die
有权
半导体器件包括设置在半导体管芯上的预制屏蔽框架
- Patent Title: Semiconductor device including pre-fabricated shielding frame disposed over semiconductor die
- Patent Title (中): 半导体器件包括设置在半导体管芯上的预制屏蔽框架
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Application No.: US13350692Application Date: 2012-01-13
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Publication No.: US09406619B2Publication Date: 2016-08-02
- Inventor: Reza A. Pagaila , Byung Tai Do , Dioscoro A. Merilo
- Applicant: Reza A. Pagaila , Byung Tai Do , Dioscoro A. Merilo
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/552
- IPC: H01L23/552 ; H01L23/538 ; H01L21/56 ; H01L21/683 ; H01L23/31 ; H01L23/498 ; H01L25/10 ; H01L23/00

Abstract:
A semiconductor device includes a pre-fabricated shielding frame mounted over a sacrificial substrate and semiconductor die. An encapsulant is deposited through an opening in the shielding frame around the semiconductor die. A first portion of the shielding frame to expose the encapsulant. Removing the first portion also leaves a second portion of the shielding frame over the semiconductor die as shielding from interference. A third portion of the shielding frame around the semiconductor die provides a conductive pillar. A first interconnect structure is formed over a first side of the encapsulant, shielding frame, and semiconductor die. The sacrificial substrate is removed. A second interconnect structure over the semiconductor die and a second side of the encapsulant. The shielding frame can be connected to low-impedance ground point through the interconnect structures or TSV in the semiconductor die to isolate the die from EMI and RFI, and other inter-device interference.
Public/Granted literature
- US20120112328A1 Semiconductor Device and Method of Mounting Pre-Fabricated Shielding Frame over Semiconductor Die Public/Granted day:2012-05-10
Information query
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