Invention Grant
- Patent Title: Integrated solution for solid state light sources in a process chamber
- Patent Title (中): 处理室中固态光源的集成解决方案
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Application No.: US13778991Application Date: 2013-02-27
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Publication No.: US09406653B2Publication Date: 2016-08-02
- Inventor: Joseph Johnson , Joseph M. Ranish
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: F26B3/30
- IPC: F26B3/30 ; H01L25/075 ; H01L33/60 ; H01L33/64
Abstract:
Apparatus for providing pulsed or continuous energy in a process chamber, and methods of fabricated said apparatus, are provided herein. The apparatus may include a substrate having a plurality of electrical terminals disposed on one or more surfaces of the substrate, a plurality of solid state sources grown on top of the plurality of electrical terminals, the plurality of solid state sources providing pulsed or continuous energy when electrically powered, and one or more cooling channels formed in one or more areas of the substrate.
Public/Granted literature
- US20140241707A1 INTEGRATED SOLUTION FOR SOLID STATE LIGHT SOURCES IN A PROCESS CHAMBER Public/Granted day:2014-08-28
Information query
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